Crossing Automation - SMIF - Load Port Transfer™
Crossing Automation's SMIF-LPT (Load Port Transfer) is an ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools. The SMIF-LPT is designed for adaptive and equipment manufacturer applications for vacuum load-lock tools, which require an external lateral cassette transfer mechanism.
The SMIF-LPT provides SMIF capability for a wide variety of wafer fab tools and leads the industry in reduced cycle time and reduced footprint.
Maximum Productivity & Profitability
- A robust kinematic interface provides quick, accurate, and reliable mounting and removal (a hinge and latch option is available for equipment manufacturer integration).
- Wafer sensing and reseating system prevents wafer breakage.
- Wafer transfer is accomplished in a better than Class 1 mini-environment which ensures maximum protection from particulate contamination.
- Fast load and unload cycle time leads industry.
- Integrated SMART-Tag Auto ID provides lot tracking and control.
- Installed base of over 10,000 LPT/LPI units.