Fremont, CA, October 15, 1996 - Asyst Technologies, Inc. (NASDAQ:ASYT), the pioneer and leading supplier of SMIF-based technology solutions, today introduced a new SMIF semiconductor wafer transfer system providing revolutionary minienvironment interface capabilities for platform-type wafer processing tools provided by original equipment manufacturers (OEMs). The SMIF LPO-2200TM represents a SMIF development breakthrough, overcoming the difficult challenge of integrating SMIF I/Os and SMIF-PodsTM with process tools that have no provision for wafer cassette indexing during wafer transfer.

Responding to the need for SMIF integration in platform tools, the LPO-2200 is designed to meet the industry need for equipment makers to integrate SMIF into their process systems while maintaining an ergonomic load height. The LPO-2200 will support a reduced 200mm interface footprint due to direct system integration. In addition, wafer protrusion sensing and automatic wafer reseating provide a comprehensive SMIF solution not thoroughly addressed by other SMIF technology providers.

As the newest member of Asyst's Load Port Series of SMIF system solutions, the LPO-2200 addresses the unique I/O challenges of tools with a z-axis wafer handler and stationary wafer cassette platform. Enabling the use of SMIF-pods for wafer transfer, the LPO-2200 offers an ultra-clean (below Class 1) wafer retrieval environment -- an increasingly critical component in integrated circuit (IC) production strategies. Based on the company's proven SMIF technology, the new system is compatible with Asyst's paperless lot-tracking system, the SMART-TravelerTM System (STS).

Commenting on the latest addition to the Load Port Series, John Field, Asyst's vice president of Marketing and OEM Sales, noted that the semiconductor industry's ultimate resurgence will include new and more aggressive production strategies that require comprehensive manufacturing solutions today. "With the addition of the LPO-2200 to our OEM product offerings, we provide integrated SMIF solutions to cover virtually all types of tool platforms," stated Field. "Overcoming the unique SMIF challenge that platform-type tools traditionally presented, we are well positioned to help ensure our OEM customers' success as they design and manufacture tools with integrated SMIF capability."

Asyst reports that platform-type tools make up approximately 20 percent of all IC wafer processing equipment, while indexer- and loadlock-type tools comprise the remaining 80 percent. By introducing a system specifically addressing platform-type tools, Asyst now, through its Load Port Series, offers SMIF system solutions for 100 percent of the wafer process tools provided by all original equipment manufacturers (OEMs).

Asyst will display the LPO-2200 at SEMICON/Southwest, October 15-16, in Austin, Texas, in booth #2024.

About Asyst
Asyst Technologies, Inc. is a leading provider of material control and automation systems that help semiconductor manufacturers improve their integrated circuit (IC) manufacturing productivity. The company's Asyst-SMIF™ System combines state-of-the-art minienvironments with advanced robotics to create ultraclean processing environments that are both comprehensive and flexible. The SMART-Traveler™ System (STS) works in tandem with SMIF to eliminate misprocessing. Both Asyst-SMIF and its companion STS products are integral to seamless factory automation. Asyst's subsidiary, Asyst Automation, Inc., focuses on material handling control software and inter-bay/intra-bay automation systems. The company's newest subsidiary, Asyst Software, Inc., is dedicated to the development of software products for equipment communications and automated material handling, identification and tracking.

Founded in 1984, Asyst Technologies, Inc. is headquartered in Fremont, CA, with facilities in Europe and the Far East. Asyst Automation, Inc. is located outside Boston, Mass., with Asyst Software located in San Jose, CA The company's common stock trades on the NASDAQ Stock Market under the symbol ASYT.

About SMIF
SMIF stands for Standard Mechanical InterFace, the material handling approach that enables wafer transfer to and from sealed SMIF environments without exposure to cleanroom ambient conditions. SEMI standards exist for 150- and 200mm wafer sizes and are now being defined for 300mm.

Editors' Note: LPO stands for "load port opener."