Rockville, MD, October 24, 1996 - Fusion Systems Corporation (Nasdaq NM: FUSN) today announced that it has signed a cross-license agreement with Asyst Technologies, Inc. (Nasdaq NM: ASYT) relating to integrated Standard Mechanical InterFace (SMIF) technology.

Standard Mechanical InterFace is an automated wafer handling system that transports materials between different cleanroom areas in a semiconductor manufacturing environment without exposing the sensitive material to possible contamination. The materials are housed in "minienvironment" containers called Asyst SMIF-Pods™ that maintain Class 1 or better cleanroom conditions.

The announcement follows the joint development by Fusion and Asyst of an integrated system that accommodates SMIF containers without significantly extending the footprint or requiring side access for Fusion's compact Gemini™ platform. Under the agreement Fusion is able to manufacture and provide integrated SMIF systems to its customers for its microwave plasma ashing, ozone ashing and photostabilizer systems; and Asyst Technologies will be able to extend its SMIF product offerings to include improvements evolving from the integrated SMIF development.

"We are very pleased to be able to work with Asyst, the recognized leader in SMIF technology and applications, in developing an integrated SMIF system for our semiconductor equipment product lines." commented John Matthews, Fusion Semiconductor's President. "There is a strong trend toward using standard automation systems in the manufacture of semiconductor devices. With this agreement, we are continuing our strategy of making available the most advanced technology to our customers."

Mr. Matthews went on to explain how the integrated SMIF on Fusion's Gemini™ tools added value without significantly increasing the amount of cleanroom space required to support such a system, a significant advantage over competitive alternatives. "With access to Asyst's technology and leadership experience in SMIF applications, we were able to develop a tool that only requires four inches of space off the front of the machine as opposed to approximately 28 inches for alternative systems, a significant space savings and advantage, which, when coupled with the space savings advantage of the Gemini™ platform which has two processing chambers and does not require side access for service, adds up to considerable space savings, an important consideration given to the selection of equipment by chipmakers."

About Asyst
Asyst Technologies, Inc. is a leading provider of material control and automation systems that help semiconductor manufacturers improve their integrated circuit (IC) manufacturing productivity. The company's Asyst-SMIF™ System combines state-of-the-art minienvironments with advanced robotics to create ultraclean processing environments that are both comprehensive and flexible. The SMART-Traveler™ System (STS) works in tandem with SMIF to eliminate misprocessing. Both Asyst-SMIF and its companion STS products are integral to seamless factory automation. Asyst's subsidiary, Asyst Automation, Inc., focuses on material handling control software and inter-bay/intra-bay automation systems. The company's newest subsidiary, Asyst Software, Inc., is dedicated to the development of software products for equipment communications and automated material handling, identification and tracking. Founded in 1984, Asyst Technologies, Inc. is headquartered in Fremont, CA, with facilities in Europe and the Far East. Asyst Automation, Inc. is located outside Boston, Mass., with Asyst Software located in San Jose, CA The company's common stock trades on the Nasdaq Stock Market under the symbol ASYT.

About SMIF
SMIF stands for Standard Mechanical InterFace, the material handling approach that enables wafer transfer to and from sealed SMIF environments without exposure to cleanroom ambient conditions. SEMI standards exist for 150- and 200mm wafers sizes and are now being defined for 300mm.

Fusion Systems Corporation is a leading supplier of single-wafer ashers and photostabilizers used in the fabrication of advanced semiconductor devices. The Company is headquartered in Rockville, Maryland and has offices throughout the United States, Europe, Japan and Korea.