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Press Release

Asyst Technologies Receives $16 Million Order from
Taiwan Semiconductor Manufacturing Company (TSMC)


TSMC names Asyst "preferred vendor of choice" for OEM suppliers

Fremont, CA, April 15, 1997 - Asyst Technologies, Inc. (NASDAQ:ASYT), the leading supplier of minienvironment and SMIF-based technology to the worldwide semiconductor industry, today announced it has been awarded a major, multiple-phase order from Taiwan Semiconductor Manufacturing Company Ltd. (TSMC) (Hsinchu, Taiwan) -- the first pure integrated circuit (IC) foundry company. Valued at over $16 million, the order is for several hundred Asyst SMIF-LPTTM (Load Port Transfer) systems for delivery to four TSMC fabs within calendar 1997. In addition, as part of its key supplier program to achieve overall equipment continuity across manufacturing processes, TSMC named Asyst as "preferred vendor of choice" for TSMC's original equipment manufacturer (OEM) tool suppliers providing integrated SMIF.

Initial shipments of the LPT systems have already begun to TSMC Fabs 3 and 4 , with shipments to its new Fab 5 expected to begin in June 1997. The balance of the order is scheduled for delivery to WaferTech -- TSMC's first U.S.-based joint-ventured foundry -- later in 1997. The Asyst LPT's will be used by TSMC to achieve better-than-Class 1 processing environments with integral lot tracking for the production of advanced logic, mixed signal and various memory ICs on 8-inch wafers. These capabilities provide important manufacturing advantages in support of TSMC's collective fab wafer output of nearly two million wafers per year.

Mr. C.R. Chang, TSMC's Fab 5 deputy director, explained the key role Asyst and its products continue to play in TSMC's technology leadership and manufacturing excellence goals. Chang said, "TSMC remains dedicated to strengthening its leadership in providing state-of-the-art manufacturing services for advanced ICs. Asyst's products provided the ultraclean manufacturing connectivity we required to reach our current ASIC (application-specific integrated circuit) output level." Chang added, "This made Asyst's SMIF products the obvious choice as we ramp up our 8-inch wafer production, and led us to name Asyst as a preferred supplier."

As TSMC's "preferred vendor of choice," Asyst's products will be recommended as the integrated SMIF solution on all process and metrology systems provided by OEM suppliers. Over 90 percent of TSMC's overall production utilizes SMIF-based manufacturing. Asyst reports the order also incorporates Asyst SMIF-Pods and SMART-tags.

Terry L. Moshier, Asyst's executive vice president and chief operating officer, commented on the importance of the order, noting, "Aggressive production schedules are indicative of the Asia-Pacific region. These schedules require proven SMIF methodologies flexible enough to meet current production rates, as well as increasing production rates, such as those while TSMC's new 8-inch facilities reach full production." Moshier continued, "We are extremely pleased to be named a preferred SMIF supplier of choice. We look forward to continue helping TSMC reach its production goals, and to a continued strong relationship."

The LPT resolves the robotic-transfer (I/O) challenges specific to vacuum loadlock equipment and cluster tools while improving manufacturing ergonomics and reducing cassette transfer cycle times by as much as 60 percent. In addition, the LPT helps conserve valuable cleanroom floor space by integrating directly with the full range of these tools. Conforming to Semiconductor Equipment and Materials International (SEMI) ergonomic standards, the LPT integrates SMIF-Pod cassette loading and unloading into a wide variety of 6- and 8-inch wafer processing tools. Asyst is the market leader in providing OEMs with integrated SMIF technology, with almost all process tools now featuring SMIF compatibility.

About TSMC
TSMC is the world's largest and fastest growing dedicated semiconductor foundry manufacturing more than 1.5 million 6-inch wafers per year in 1996. The company offers CMOS fabrication processes that focus on advanced logic, mixed signal and a wide array of memory processes. The company posted growth of 37 percent in 1996. Currently, the company's 6-inch fabs (Fabs 1, 2A and 2B) put out 100,000 wafers per month. Fab 3, which commenced 8-inch wafer output in September 1995, is in volume production of a variety of customers, having ramped to 25,000 8-inch wafers per month in 1996. TSMC fabs are located in Hsinchu, Taiwan. The company has subsidiaries in the United States and Europe. In mid-1996, TSMC broke ground on its first U.S. foundry, WaferTech -- a $1.2 billion joint venture with Altera, Analog Devices and ISSI. Launching production in 1998, the new fab will have a monthly output of 30,000 8-inch wafers.

About Asyst
Asyst Technologies, Inc. is a leading provider of material handling systems that help semiconductor manufacturers improve their integrated circuit (IC) manufacturing productivity. The company's Asyst-SMIFTM System combines state-of-the-art minienvironments with advanced robotics to create ultraclean processing environments that are both comprehensive and flexible. The SMART-TravelerTM System (STS) works in tandem with SMIF to eliminate misprocessing. Both Asyst-SMIF and its companion STS products are integral to seamless factory automation. Asyst Software, Inc., is dedicated to the development of software products for equipment communications and automated material handling, identification and tracking. Founded in 1984, Asyst Technologies, Inc. is headquartered in Fremont, CA, with facilities in Europe and the Far East. Asyst Software is located in San Jose, CA

About SMIF
SMIF stands for Standard Mechanical InterFace, the material handling approach that enables wafer transfer to and from sealed SMIF environments without exposure to cleanroom ambient conditions. SEMI standards exist for 150- and 200mm wafer sizes and are now being defined for 300mm.

 


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