


Press Release

Asyst Technologies Announces 150th SMIF-Integrated Design Win

Nikon again selects Asyst-SMIF
for integrated solution
Fremont, CA, May 13, 1997 -
Asyst Technologies, Inc. (NASDAQ:ASYT), the leading supplier
of minienvironment and SMIF-based technology to the worldwide
semiconductor industry, today announced it has reached a major
industry milestone -- 150th SMIF-integration design
win. Nikon Corporation (Tokyo, Japan) has contracted with Asyst
for integrated SMIF capabilities for a line of Nikon's wafer
steppers. With the Nikon design win, there are now 150 different
semiconductor process tools featuring integrated Asyst-SMIF technology.
Nikon and Asyst have been working together since 1994, when Nikon
integrated Asyst-SMIF into their wafer inspection systems.
The newest tools, Nikon's NSR Series
wafer steppers, will incorporate Asyst's SMIF-INXR150 reticle
indexer to utilize Asyst's reticle pods to ensure a better-than-Class
1 processing environment. Having developed integrated Asyst-SMIF
solutions for tools that are represented in 90 percent of the
front-end process areas in today's fabs, this latest design win
signals Asyst's commanding leadership in the OEM market.
John Field, Asyst's vice president
of marketing and OEM sales, stated, "SMIF is now a proven
manufacturing methodology, and the new fabs being built are moving
rapidly to SMIF. Asyst is focused on providing integrated solutions
that enable SMIF to be implemented in a turn-key manner. The
150th design win with Nikon is a clear statement that we are
making significant strides in that effort."
The design win also indicates Asyst's
strong penetration into the Japan OEM market. According to Asyst,
revenues from Japan equipment manufacturers increased over 500
percent in the last two years as a direct result of its commitment
to providing this key regional market with localized customer
support. Field said, "Dedicating the necessary resources
to this market allows us to directly address the unique requirements
of Japan-based tool manufacturers -- a strategic component in
strengthening our international OEM presence."
Asyst-SMIF indexers overcome the
significant cost and floor space challenges presented by stand-alone
robotic transfer systems to achieve SMIF compatibility. Field
explained that Asyst's SMIF I/O products integrate directly into
the process equipment with no increase to system footprint area "Allowing
chipmakers to conserve valuable floor space and reduce cost of
ownership by ordering SMIF-equipped process tools directly from
the OEM."
The SMIF-INX R150, a SMIF-Indexer
for 6-inch reticles, joins Asyst's SMIF-Indexer Series which
includes the SMIF-INX 2150 (150mm wafers) and the SMIF-INX 2200
(200mm wafers). Designed for a full range of process equipment,
the Asyst indexers serve as I/O ports for Asyst SMIF-Pods and
reticle pods. Optimizing and expediting OEM integration strategies,
Asyst's team of OEM integration specialists work closely with
worldwide equipment manufacturers in the development of both
hardware and software manufacturing connectivity solutions.
About Asyst
Asyst Technologies, Inc. is a leading provider of material handling
systems that help semiconductor manufacturers improve their
integrated circuit (IC) manufacturing productivity. The company's
Asyst-SMIF System combines state-of-the-art minienvironments
with advanced robotics to create ultraclean processing environments
that are both comprehensive and flexible. The SMART-Traveler System
(STS) works in tandem with SMIF to eliminate misprocessing.
Both Asyst-SMIF and its companion STS products are integral
to seamless factory automation. Asyst Software, Inc., is dedicated
to the development of software products for equipment communications
and automated material handling, identification and tracking.
Founded in 1984, Asyst Technologies, Inc. is headquartered
in Fremont, CA, with facilities in Europe and the Far East.
Asyst Software is located in San Jose, CA
About SMIF
SMIF stands for Standard Mechanical InterFace, the material handling
approach that enables wafer transfer to and from sealed SMIF
environments without exposure to cleanroom ambient conditions.
SEMI standards exist for 150- and 200mm wafer sizes and are
now being defined for 300mm.
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