


Press Release

Asyst Technologies Ships 1,000th Load Port Transfer System

Applied Materials to receive
milestone Asyst-SMIF integrated solution
Fremont, CA, July 2, 1997 -
Asyst Technologies, Inc. (NASDAQ:ASYT), the leading supplier
of minienvironment and SMIF-based technology to the worldwide
semiconductor industry, today announced a major milestone --
shipment of its 1,000th load port transfer system. The milestone
Asyst SMIF-LPT will ship this week to Applied Materials,
Inc. (Santa Clara, CA), and will be used on Applied Materials'
Centura 5200 cluster tool.
Gerry McFaull, Asyst's vice president
of manufacturing, noted that since the product's introduction
in March 1996, Asyst continues to experience industry-wide demand
for its SMIF-LPT. "The SMIF-LPT's rapid market acceptance
has established it as a preferred SMIF solution among our customers.
This rate of system acceptance positions the SMIF-LPT as an industry
standard for fast, flexible, wafer loading and unloading I/Os," stated
McFaull. "Accommodating the accelerated ramp up required
for the SMIF-LPT for 200 mm wafers has prepared us to meet the
anticipated global demands of SMIF products as the industry moves
toward 300 mm processing," added McFaull.
Resolving the robotic-transfer challenges
specific to vacuum loadlock processing equipment and cluster
tools, the SMIF-LPT meets Semiconductor Equipment and Materials
International (SEMI) standard E-15 requirements for ergonomic
load height. In addition, the SMIF-LPT, which integrates directly
with the process tool, provides an ultraclean wafer environment
that exceeds the requirements of 0.25-micron processing by a
factor of 10.
According to Nick Bright, managing
director of the automation technology division at Applied Materials,
the SMIF-LPT's proven production capabilities prompted the company's
selection. "We are pleased to be part of this milestone.
Asyst has a strong reputation for providing ultraclean, reliable
handling systems. We look forward to incorporating this system
as part of our Centura and Endura line of processing solutions," stated
Bright.
The SMIF-LPT is an ergonomically
designed SMIF I/O, which facilitates the loading and unloading
of Asyst SMIF-Pods and cassettes into a wide variety of
150mm and 200mm wafer processing and metrology tools. The SMIF-LPT
is designed for both adaptive and original equipment manufacturing
(OEM) applications for vacuum loadlock tools that require an
external lateral cassette transfer mechanism.
About Applied Materials
Applied Materials, Inc. is a Fortune 500 global growth company
and the world's largest supplier of wafer fabrication systems
and services to the global
semiconductor industry. Applied Materials is traded on the Nasdaq National
Market System under the symbol "AMAT." Applied Materials web
site is http://www.AppliedMaterials.com.
About Asyst
Asyst Technologies, Inc. is a leading provider of material handling
systems that help semiconductor manufacturers improve their
integrated circuit
(IC) manufacturing productivity. The company's Asyst-SMIF System
combines state-of-the-art minienvironments with advanced robotics to create
ultraclean processing environments that are both comprehensive and flexible.
The SMART-Traveler System (STS) works in tandem with SMIF to eliminate
misprocessing. Both Asyst-SMIF and its companion STS products are integral
to seamless factory automation. Asyst Software, Inc., is dedicated to the
development of software products for equipment communications and automated
material handling, identification and tracking.
About SMIF
SMIF stands for Standard Mechanical InterFace, the material handling approach
that enables wafer transfer to and from sealed SMIF environments without
exposure to cleanroom ambient conditions. SEMI standards exist for 150
and 200 mm wafer sizes and are now being defined for 300 mm.
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