Fremont, CA, July 10, 1997 - Asyst Technologies, Inc. (NASDAQ:ASYT), the leading supplier of minienvironment and SMIF-based technology to the worldwide semiconductor industry, today unveiled a new series of products designed for 300mm isolation technology-based material handling – the Asyst SMIF-300™ Series. The SMIF-300 products are designed around the 300mm front-opening standard (such as FOUP, 300mm Interface and others) and are engineered to be used as "building blocks" by equipment suppliers into easily integrate 300mm wafer handling and buffering to their process tools, as well as integrated circuit (IC) manufacturers integrating mini-stocking solutions and intrabay automation systems for their 300mm factories.

The Asyst SMIF-300 Series is the first industry product offering in this segment meeting all Semiconductor Equipment and Materials International (SEMI) and International 300mm Initiative (I300I) guidelines. Leveraging Asyst's pioneering isolation technology principles and experience with over 150 SMIF-integration design wins, the SMIF-300 Series products ensure a better-than-Class 1 300mm processing environment. The Asyst SMIF-300 Series is composed of the Asyst SMIF-300FL™, the Asyst SMIF-300WMS™ (Wafer Management System) and the Asyst SMIF-300RL™ -- the industry's first 300mm buffering system.

John Field, vice president of marketing and OEM sales at Asyst Technologies, said that 300mm activity by top-tier chipmakers is accelerating at a rapid pace. Field explained that this significant technological transition toward 300mm production requires more than just 300mm processing equipment. "The Asyst SMIF-300 Series provides the advanced manufacturing connectivity chipmakers require to make the successful transition to 300mm production -- all in a standardized format that offers plug-and-play capabilities with all 300mm processing tools," noted Field. "The Asyst SMIF-300 Series' capabilities and adherence to industry standards position us well to capitalize on this emerging market," added Field.

According to industry analyst firm VLSI Research Inc. (San Jose, CA), by 2004, the semiconductor industry is projected to spend approximately $16.1 billion annually on capital equipment for 300mm processing. Nearly all of this equipment will incorporate SMIF manufacturing methodologies. "For 300mm production, the use of isolation-based technology will be the rule, rather than the exception," commented Field. "The Asyst SMIF-300 Series offers this technology as part of a comprehensive, standards-based solution. The standards adherence was a fundamental design factordeveloped to ensure equipment integration and compatibility, helping chipmakers maximize the benefits of transitioning to 300mm wafers," concluded Field.

The Asyst SMIF-300 Series provides the enabling technology required to support the sophisticated manufacturing strategies necessary to make the transition to 300mm wafers. Tony Bonora, chief technology officer at Asyst Technologies, said, "The move to 300mm will be used primarily in factoriesimplementing 0.25-micron design rules, and moving toward 0.18-micron production. For these advanced devices, new issues are arising that only isolation technology will be able to address." Bonora continued, "For instance, proper control of the wafer environment will be required at certain process steps, as the impact of airborne molecular contamination becomes better understood and quantified. The use of isolation technology enables this type of environment control, and adhering strictly to industry standards ensures our customers that Asyst SMIF-300 products will support their technology roadmaps requirements now and into the future."

About Asyst
Asyst Technologies, Inc. is a leading provider of material handling systems that help semiconductor manufacturers improve their integrated circuit (IC) manufacturing productivity. The company's Asyst-SMIF™ System combines state-of-the-art minienvironments with advanced robotics to create ultraclean processing environments that are both comprehensive and flexible. The SMART-Traveler™ System (STS) works in tandem with SMIF to eliminate misprocessing. Both Asyst-SMIF and its companion STS products are integral to seamless factory automation. Asyst Software, Inc., is dedicated to the development of software products for equipment communications and automated material handling, identification and tracking.

About SMIF
SMIF stands for Standard Mechanical InterFace, the material handling approach that enables wafer transfer to and from sealed SMIF environments without exposure to cleanroom ambient conditions. SEMI standards exist for 150- and 200mm wafer sizes and are being defined for 300mm.

Note to Editors: A details sheet of the Asyst SMIF-300mm Series is attached

TECHNICAL DETAILS OF THE ASYST SMIF-300 SERIES

Asyst SMIF-300FL™:
The first 300mm load port to comply with all of the latest SEMI and I300I industry guidelines, the 300FL is compatible with all standard 300mm unified wafer pods-25 wafer pods and 13 wafer pods. The system maintains a better-than-Class 1 environment while transferring 300mm wafers into a load-lock chamber, utilizing an optional fan filter unit. In addition, the 300FL allows optimized operator and wafer protection with its wafer protrusion sensor and human obstruction sensor. The 300FL offers direct, adjustable bolt-on interface per SEMI standards. Asyst has also developed an optional base to allow fast access to the front of the tool and support software integration and development prior to completion of the tool's frame. The 300FL's robust structure will ensure interface to tool alignment, wafer precision and port seal integrity.

Asyst SMIF-300RL™:
The industry's first local tool buffer to meet SEMI standards and I300I guidelines, the 300RL allows 300mm wafer pods to be stored at the processing tool, decreasing load times and fab storage area requirements. The 300RL can be uniquely scaled to fit various types of process equipment with various throughput rates. Its scaleable architecture minimizes footprint requirements for each process tool.

Asyst SMIF-300 Wafer Management System™ (WMS):
The 300WMS is a fully automated SMIF system that maintains a better-than-Class 1 environment during critical wafer handling functions, including wafer lot splitting, sorting, merging, randomizing, and/or batch transfers from one cassette to another. The 300WMS accomplishes these wafer handling functions while providing complete host control.