Editors' Summary Removing inefficiencies in managing the manufacturing flow is a fundamental issue in semiconductor manufacturing. This is a competitive and profitability issue for all semiconductor manufacturers. Consequently, there is a trend to automate the traditionally manual-intensive activities in the fab, such as WIP tracking, to help achieve this next level of manufacturing productivity and integrity. By adding RFID technology-an optimized tracking solution at non-SMIF manufacturing facilities-Asyst becomes the leading supplier offering automated WIP tracking for both SMIF and non-SMIF factories. With RF- and infrared-based technology, Asyst is also positioned to meet the automated WIP tracking needs for future 300 mm IC factories.

Fremont, CA, February 17, 1998 - Asyst Technologies, Inc. (NASDAQ:ASYT), the leading supplier of minienvironment and SMIF-based technology to the worldwide semiconductor industry, today announced it has reached an agreement with Fluoroware, Inc., the leading supplier of materials management solutions, to acquire Fluoroware's FluoroTrac® automated radio frequency identification (RFID) technology for automated work-in-progress (WIP) tracking in semiconductor factories. Under the terms of the agreement, Asyst will acquire all of FluoroTrac's intellectual property including RF-based ID/tracking solutions, inventory and installed-base opportunities from Fluoroware in consideration for approximately $3 million.

FluoroTrac, an automated ID system, assigns each wafer carrier a unique ID number contained in a radio frequency tag embedded in each carrier. The tag is then automatically read at each process tool. This RF tag technology minimizes the misprocessing of wafer lots within the factory's manufacturing system by assuring the correct wafer lot is delivered to the proper tool. Each FluoroTrac system is designed from standard components, enabling system configuration to a customer's exact requirements. Additional benefits of the FluoroTrac system include: increased throughput; real-time tracking of container usage; reduced potential for contamination; and increased operator productivity.

According to Dr. Mihir Parikh, Asyst's chairman and chief executive officer, "The need for automation to increase productivity and yield in semiconductor manufacturing is undeniable. The Fluoroware-developed technology, FluoroTrac RF, complements our infrared-based SMART-Traveler™ (STS) WIP tracking and ID systems by providing our end-user and OEM customers with two production-proven approaches to automated WIP tracking and auto ID, addressing both SMIF and non-SMIF applications." Asyst believes there are in excess of 400 150 mm and 200 mm fabs which could benefit from RFID.

Asyst believes that while automated tracking and ID are extensive in today's fabs, they will gain even greater importance as manufacturing complexities increase due to the added functionality being built into new semiconductor devices. This industry scenario presents market potential for Asyst, especially with automated WIP tracking expected to be standard in 300 mm processing. Parikh continued, "Offering both infrared- and RF-based solutions helps reinforce our leading position in 200 mm manufacturing, as well as in future 300 mm requirements."

Asyst intends to use its newly enhanced product line to provide its customers with the technology building blocks to support evolving manufacturing requirements. With RFID technology, Asyst may be able to extend automated tracking into all areas of the fab, including chemical mechanical planarization (CMP)-which specifically requires cassette tracking in many cases. Combined with factory computer integrated manufacturing (CIM) systems, Asyst's automated WIP tracking products may eliminate misprocessing and other operational errors and automatically track and collect processing data. Asyst intends to leverage both FluoroTrac and STS solutions to help its end-user and OEM customers optimize manufacturing to quickly reach and maintain maximized yields.

Stan Geyer, Fluoroware's president and chief executive officer, noted that as the industry moves toward 300 mm wafer processing, closer technology relationships, such as that between Asyst and Fluoroware, will help provide the industry with better solutions to reach next-generation production and yield management objectives. Geyer stated, "FluoroTrac's RF technology is a good fit for Asyst's suite of integrated chip manufacturing solutions. The addition of Fluoroware's RF-based technology to Asyst's established WIP systems will offer customers solutions to help keep costs down and yields up. The sale also enables us to strengthen our focus on one of our core competencies, namely providing wafer management solutions compatible with the current and future needs of the industry-especially in the area of material handling automation."

Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to, general economic conditions, semiconductor industry cycles, risks associated with the acceptance of new products and product capabilities, and other factors more fully detailed in the Company's most recent Forms 10-K and 10-Q, and annual report to shareholders.

About Asyst
Asyst Technologies, Inc. is a leading provider of material handling systems that help semiconductor manufacturers improve their integrated circuit (IC) manufacturing productivity. The company's Asyst-SMIF™ System combines state-of-the-art minienvironments with advanced robotics to create ultraclean processing environments that are both comprehensive and flexible. The SMART-Traveler™ System (STS) works in tandem with SMIF to eliminate misprocessing. Both Asyst-SMIF and its companion STS products are integral to seamless factory automation. Asyst Software, Inc. is dedicated to the development of software products for equipment communications and automated material handling, identification and tracking. Founded in 1984, Asyst Technologies, Inc. is headquartered in Fremont, CA, with facilities in Europe and the Far East. Asyst Software is located in San Jose, CA

About SMIF
SMIF stands for Standard Mechanical InterFace, the material handling approach that enables wafer transfer to and from sealed SMIF environments without exposure to cleanroom ambient conditions. SEMI standards exist for 150, 200 and 300 mm wafer sizes.

About Fluoroware
Headquartered in Chaska, Minn., Fluoroware Inc. is an ISO 9001 registered, worldwide leader in providing materials management products and solutions to the microelectronics, chemical processing and other mission-critical industries. Fluoroware has manufacturing facilities in the United States, Germany, Japan, Singapore and South Korea. Through alliances with Metron Technology and other distributors, Fluoroware has sales and customer support facilities on six continents. Additional information about the company is available on Fluoroware's home page on the World Wide Web, located at http://www.fluoroware.com