Fremont, CA, March 19, 1998 - Asyst Technologies, Inc. (NASDAQ:ASYT), the leading supplier of minienvironment and SMIF-based technology to the worldwide semiconductor industry, today announced it has received a multimillion-dollar order and has begun the delivery process for Asyst-SMIF™ systems from a fab scheduled to open in the northwestern United States. The initial order, valued at more than $9 million, includes multiple Asyst SMIF-LPT™ (Load Port Transfer) systems, SMIF-Enclosures™ (minienvironments), SMIF-Pods™ and SMART-Traveler™ Systems (STS). Asyst reports that with this order, the company has extended its lead as the dominant SMIF provider in the U.S. market. Installation of the Asyst-SMIF systems for 8-inch wafer processing began in January.

The Asyst-SMIF systems will be used in a foundry expansion scheduled to produce various integrated circuit (IC) products with 0.35 and 0.25 micron design rules. Asyst's SMIF I/O systems address the accurate manufacturing execution of IC products having different design rules, helping facilities to quickly meet aggressive production schedules.

According to Asyst, as chipmakers in the United States, especially in the Pacific Northwest region, continue to expand semiconductor production capabilities, Asyst continues to experience rapid adoption of SMIF manufacturing. Terry Moshier, Asyst's president and chief operating officer, explained that with this order, Asyst continues to provide all of the SMIF-based technology to every SMIF semiconductor manufacturing facility in the Pacific Northwest region of the United States. "The SMIF technology and process enables consistent and low-risk manufacturing. The continued implementation of Asyst's equipment is evidence of the true impact of SMIF-based technology in advanced semiconductor manufacturing," remarked Moshier.

The foundry plans to use the Asyst-SMIF systems to maintain manufacturing output levels of 35,000 wafers per month for IC devices with 0.25 micron design rules. Asyst expects additional orders from this facility as production continues to ramp up.

Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to, general economic conditions, semiconductor industry cycles, risks associated with the acceptance of new products and product capabilities, and other factors more fully detailed in the Company's most recent Forms 10-K and 10-Q, and annual report to shareholders.

About Asyst
Asyst Technologies, Inc. is a leading provider of material handling systems that help semiconductor manufacturers improve their integrated circuit (IC) manufacturing productivity. The company's Asyst-SMIF™ System combines state-of-the-art minienvironments with advanced robotics to create ultraclean processing environments that are both comprehensive and flexible. The SMART-Traveler™ System (STS) works in tandem with SMIF to eliminate misprocessing. Both Asyst-SMIF and its companion STS products are integral to seamless factory automation. Asyst Software, Inc. is dedicated to the development of software products for equipment communications and automated material handling, identification and tracking. Founded in 1984, Asyst Technologies, Inc. is headquartered in Fremont, CA, with facilities in Europe and the Far East. Asyst Software is located in San Jose, CA

About SMIF
SMIF stands for Standard Mechanical InterFace, the material handling approach that enables wafer transfer to and from sealed SMIF environments without exposure to cleanroom ambient conditions. SEMI standards exist for 150, 200 and 300 mm wafer sizes.