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Press Release

Asyst
Unveils Host of New Factory and Tool Automation Products

New SMIF, minienvironment, WIP
tracking and software solutions enable enhanced semiconductor
manufacturing
Fremont, CA, July 13, 1998 -
Asyst Technologies, Inc. (Nasdaq:ASYT), the leading supplier
of manufacturing automation and Standard Mechanical InterFace
(SMIF) isolation systems for the global semiconductor industry,
today unveiled a full spectrum of hardware and software products
designed to enhance production of both 200 mm and 300 mm wafers.
Augmenting Asyst's leadership position in factory and tool automation,
these new products and technologies deliver advanced capabilities
in the SMIF/minienvironment, tool automation and material tracking/management
markets.
According to John Field, Asyst's
vice president of marketing, Asyst continues to innovate in all
three of these areas-enhancing its existing solution set and
addressing chipmakers' emerging challenges. "The new products
on display this week at the SEMICON West tradeshow enable chipmakers
to reduce their manufacturing costs, increase reliability, enhance
process control and achieve greater levels of automation in their
fabs," explained Field.
SMIF Products
In the SMIF and minienvironment sector Asyst pioneered, the company has added
five new products that adhere to the industry's most advanced standards
while delivering unprecedented particle control and cost-of-ownership (COO)
advantages.
- SMIF-LPT 2200 SE: Responding
to the industry's need for high throughput SMIF I/O devices
to optimize equipment utilization, this newest SMIF robotic
interface provides the fastest wafer transfer in the industry,
with cycle times under 35 seconds for load/unload. It also
incorporates several new features to improve the robustness
of the interface. As a result, its reliability sets a new industry
standard with a mean-time-between-failure of more than 50,000
run cycles, better-than-Class 1 particle performance in integrated
minienvironments and less than one wafer break per 100,000
wafer handling operations.
- SMIF-Pod 300: Composed of
advanced materials, this newest addition to Asyst's growing
300 mm product family delivers improved control over both organic
and inorganic contamination. Additionally, this is the first
SMIF-pod to comply with the stringent SMRD 4910 flammability
protocol.
- 200 mm Gen 5 SMIF-Pod: Incorporating
the proven performance benefits of Asyst's Gen 4 pod, the Gen
5 pod features contoured side handles with independent handle
rotation for improved operator ergonomics-a critical factor
in less-automated 200 mm fabs. By eliminating metal hardware
inside the pod, Gen 5 also eliminates the possibility of metallic
contamination while delivering advanced sealing capabilities
for increased particle control. Finally, the new system features
a wash-in-place design with a smoother interior to minimize
water collection and make cleaning the pod faster and easier.
Minienvironment Control
- SMART-CMS: Asyst's new minienvironment
control monitoring system automates protection of individual
process tools in the fab. Representing an important extension
to Asyst's customized tool-minienvironment product family,
SMART-CMS enables continuous "intelligent" monitoring and control
of the internal environmental conditions of the minienvironment.
As such, it provides a variety of monitoring/control options
to manage pressure, particle levels and detection capability
for fire and smoke. Upon detection of adverse environmental
conditions, SMART-CMS can either correct the condition, provide
an audible alarm to fab personnel or perform an emergency equipment
shutdown-all based upon customer defined programming. In addition
to enhancing process results, this capability automates and
optimizes protection of valuable work in process (WIP), costly
process tools and the overall manufacturing facility.
Tool Automation
- Front-End Factory Interface Concept:
The latest in a series of modular tool automation solutions
from Asyst, the new Front-End Factory Interface Concept is
a 200 mm and 300 mm compatible modular factory interface. Based
on the SMIF-WMS and designed to automate the front-end
of process tools, this important new product provides OEMs
with a modular factory interface that can reduce tool footprint,
optimize throughput, lower COO and ensure compatibility with
fab-wide information systems. Since this modular interface
can address both 200 mm and 300 mm requirements, it also provides
a critical upgrade path for process tools, while helping to
reduce the cost associated with 300 mm tool development.
Material Tracking/Management
To enhance the Auto-ID and automated material tracking/management capabilities
afforded by its SMART-Traveler System (STS), Asyst has introduced two new
paperless WIP tracking devices. Company officials report that this is an
increasingly critical capability in today's fabs based on its ability to
increase manufacturing yields by reducing rework and misprocessing.
- SMART-Tag 8400: It features
a larger graphic LCD display that allows multiple text lines
and graphics, plus a two-way communication capability that
can take the place of monitors or terminals in some areas of
the fab. This saves valuable cleanroom floor space to make
room for additional process tools or WIP storage. Incorporating
a number of design advances over its predecessor, the new 8400
tag leverages industry standard SECS I/II messaging interfaces
to speed configuration and enhance overall system efficiency.
Asyst reports that all of these new
products will be displayed in the Asyst Booth #1338 at SEMICON
West 98.
Except for statements of historical
fact, the statements in this press release are forward-looking.
Such statements are subject to a number of risks and uncertainties
that could cause actual results to differ materially from the
statements made. These factors include, but are not limited to,
general economic conditions, semiconductor industry cycles, risks
associated with the acceptance of new products and product capabilities
and other factors more fully detailed in the Company's most recent
Forms 10-K and 10-Q, and annual report to shareholders.
About Asyst
The pioneer of the Standard Mechanical InterFace (SMIF), Asyst Technologies,
Inc. is the leading provider of automated material handling systems critical
to seamless factory automation in the most advanced fabs worldwide. Asyst's
comprehensive solutions, which include industry-leading 200 mm and 300
mm product offerings, result in greater fab profitability and productivity.
Through innovative developments in the software and integration services
area, Asyst Software, Inc., a wholly owned subsidiary, provides integrated
circuit (IC) manufacturers fully automated solutions addressing their most
advanced manufacturing challenges. Founded in 1984, Asyst Technologies,
Inc. is headquartered in Fremont, CA, with facilities in Europe and the
Pacific Rim. Asyst Software, Inc., is located in San Jose, CA
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