Fremont, CA, June 9, 1999 - Asyst Technologies, Inc. (Nasdaq:ASYT), the leading supplier of Standard Mechanical InterFace (SMIF) isolation and manufacturing automation solutions to the semiconductor industry, today announced it has received an order from Strasbaugh (San Luis Obispo, CA) for multiple wafer handling robots and linear wafer track systems. Strasbaugh will integrate the robotics into its 200 mm chemical mechanical planarization (CMP) Symphony tool.

"CMP and wafer grinding systems require wafer handling robots that are designed to handle the extreme environmental conditions associated with these processes. This is especially true with CMP, where corrosive chemicals and slurries are used," said Chuck Schillings, director of corporate marketing at Strasbaugh. "Because Asyst's robots are designed specifically for these extreme conditions, they are robust enough to deliver the throughput and cost-of-ownership advantages we and our customers require in volume production. These were critical factors in our decision to choose Asyst as our preferred supplier of wafer handling robots," Schillings added.

The Strasbaugh order includes Asyst's harsh chemical and atmospheric robots, and linear wafer track systems. The harsh chemical robots are designed for operation in environments such as those found in CMP and advanced deposition processing. The atmospheric robots are high-speed robots that operate in ultraclean Class 1 environments. Asyst's linear track systems allow the robots to access multiple wafer cassettes during operation, enabling increased wafer throughput and improved cost of ownership. The Asyst robotic systems have begun shipping to Strasbaugh.

Terry Moshier, president and chief operating officer of Asyst, said, "We believe the increasing customer activity in our Asyst Robotics business signals increased OEM confidence in the forecasted semiconductor industry turnaround." Moshier added, "We are pleased to be a key supplier for Strasbaugh's CMP process equipment. Not only is this order indicative of our strong ongoing relationship with Strasbaugh-a key customer for our wafer handling robots-but also of our leadership in supplying world-class robots for extreme environmental manufacturing applications."

Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to, general economic conditions, semiconductor industry cycles, risks associated with the acceptance of new products and product capabilities, and other factors more fully detailed in the Company's most recent Forms 10-K and 10-Q, and annual report to shareholders.

About Asyst:
The pioneer of the Standard Mechanical InterFace (SMIF), Asyst Technologies, Inc. is the leading provider of automated material handling systems and software critical to seamless factory automation in the most advanced fabs worldwide. Asyst's comprehensive solutions, which include industry-leading loadport, auto ID, environmental control, robotics, and automation software products for 200 mm and 300 mm applications, result in greater fab profitability and productivity.