Fremont, CA, April 24, 2000 - Asyst Technologies, Inc. (Nasdaq NM: ASYT) today announced it has achieved a significant milestone—its 50^th 300 mm OEM design win. As a result of this design win from Silicon Valley Group, Asyst's 300 mm SMIF input/output system, the SMIF-300FL™, has been integrated into SVG's ProCell™ deep ultraviolet (DUV) photoresist processing tool.

"SVG has more than 10 years of experience working with Asyst in integrating their isolation and automation technologies into our advanced lithography and photoresist processing tools," stated Boris Lipkin, president of SVG's Track Systems Division. "When integrated into our ProCell tool, Asyst's SMIF-300FLs will increase the tool's buffer capacity, the number of wafers that can be stored at one time, to 100 wafers. This will help to improve the throughput of the ProCell by improving utilization through reduced time for loading and unloading wafers."

Asyst's SMIF-300FL is designed to serve as an input/output device for loading wafers into the process tool, mapping the position of wafers and communicating with the host server. Its key features include built-in E-84 functionality-the automation communication standard used in the semiconductor industry, which reduces the software workload of the OEM tool supplier. The SMIF-300FL also includes reliable wafer mapping to ensure an accurate wafer count, as well as ensure that the wafers are properly seated in the SMIF-Pod™ before transferring the wafers to the process tool. In addition, the SMIF-300FL has a superior reliability of greater than 500,000 mean cycles before failure (MCBF).

"With an installed base of over 400 units worldwide, we believe that our SMIF-300FLs are recognized by OEM tool suppliers as key enablers to completing their bridge tool solutions," stated Mihir Parikh, Asyst's chairman and chief executive officer. "We believe that the success of our 300 mm offerings—including our SMIF-300FL, SMIF-Pod 300™ and Plus™ Portal products—demonstrates the increased market development and penetration for Asyst's 300 mm technology for full-scale semiconductor manufacturing."

Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to, general economic conditions, semiconductor industry cycles, risks associated with the acceptance of new products and product capabilities and other factors more fully detailed in the Company's recent S-3 Registration Statement.

About Silicon Valley Group: Silicon Valley Group (Nasdaq: SVGI) is a leading manufacturer of automated wafer processing equipment for the worldwide semiconductor industry. The company designs, manufactures and markets technically sophisticated equipment used in the primary stages of semiconductor manufacturing. Its products include photolithography exposure tools; photoresist processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing systems; atmospheric pressure chemical vapor deposition systems and precision optical components and systems. For more information, visit http://www.svg.com.

About Asyst:

Asyst Technologies, Inc. is the leading provider of SMIF-based minienvironment and manufacturing automation systems that enable semiconductor manufacturers to protect customers' valued assets throughout the manufacturing process while increasing manufacturing productivity. Asyst offers a broad range of 200 mm and 300 mm products that enable the Company to provide semiconductor manufacturers and OEMs automated manufacturing solutions for the transfer of wafers and information between the process equipment and the fab line.

SMIF-Pod, SMIF-Pod 300, SMIF-300FL, and Plus Portal are trademarks of Asyst Technologies, Inc. ProCell is a trademark of Silicon Valley Group.