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Press Release

Asyst Ships 1,000th Versaport 2200 System to Silicon Valley Group

Load Port Tool Now Achieving Production-level Design Wins
as Fabs Worldwide Increasingly Recognize Value in Upgrading
to SMIF Isolation Technology
Fremont, CA, February 27, 2001 -Asyst
Technologies, Inc. (Nasdaq NM: ASYT), the world's largest semiconductor
fab automation company, today announced it has reached a significant
milestone with the shipment of its 1,000th VersaPort 2200 load
port tool to Silicon Valley Group, Track Systems Division (San Jose,
Calif.). The dollar value of the order was not disclosed.
Since the VersaPort 2200's November
1999 launch, Asyst has received orders from more than 30 customers
worldwide, spurring the product to this milestone in just over
a year. A number of the most recent shipments included the company's
manual open-cassette adapter (MOCA) option, also announced today
(see separate release: "Asyst Open-Cassette Adapter Broadens
Horizons for OEM Suppliers"). Further indicating the industry's
growing adoption of the VersaPort 2200, Asyst has secured several
design wins for production-level systems from both original equipment
manufacturers (OEMs) and chipmakers.
The VersaPort 2200 is an essential
component of Asyst's Plus Portal turnkey automation solution,
which enables integration between OEM process tools and advanced
fab automation systems. The load port tool is a modular, configurable
input/output (I/O) interface that facilitates transfer of 200mm
semiconductor wafers into and out of both older-technology open
cassettes and the Standard Mechanical InterFace (SMIF)
pods used to isolate wafers in clean minienvironments. With the
new bolt-on MOCA option, which allows fabs to run open cassettes
on new 200mm tools without having to immediately move to SMIF
technology, the VersaPort 2200 truly becomes a bridge tool for
technology transition. The VersaPort accommodates both open cassettes
and 200mm SMIF-Pods on the same platform, as well as eases transition
from 200mm to 300mm technology thanks to its significant compatibility
with Asyst's 300mm Front-Load product.
"Asyst's VersaPort solution offers
a degree of flexibility and scalability unavailable anywhere
else," said Jae Park, vice president of advanced engineering
at Silicon Valley Group, Inc. "We chose to implement the VersaPort
on our Pro Cell tool front end because it works with both open
cassettes and pods and gives us a migration path to 300mm. Also,
the new MOCA option gives us the flexibility to upgrade our older
fab lines to newer 200mm equipment on an as-needed basis, providing
a huge cost savings. We believe it will help to greatly enhance
our productivity and, ultimately, our fab yields."
"Since its introduction, the VersaPort
2200 has already achieved great success in the marketplace because
of the practical solutions it offers our customers," stated Dennis
Riccio, Asyst senior vice president of global customer operations. "The
system is designed with multiple configurations based on a single
platform so that there are reduced integration and support requirements
for the OEM. Because it's also fully certified to meet ergonomic
and safety requirements, OEMs can implement the VersaPort with
full confidence in its ability to help meet their wafer-loading
and transfer needs."
The VersaPort 2200 is plug-and-play
compatible with Asyst's other front-end products, meaning that
the VersaPort and the Asyst SMIF-300FL Front-Load Series feature
significant hardware and software compatibility, so customers
who purchase the VersaPort for open-cassette and/or 200mm SMIF
and then later want to upgrade to 300mm can do so easily. This
is accomplished by employing the optional SEMI-Standard E-63
BOLTS interface hardware and a 300mm software command set designed
to ensure compatibility with Asyst's 300mm Front-Load systems.
A key advantage for OEMs who employ the VersaPort in one of its
several configurations is that it enables them to adopt the "bridge
tool" strategy for marketing their products to chipmakers, as
well.
About Asyst
Asyst Technologies, Inc. is the leading provider of isolation
and automation technologies that enable semiconductor makers
to protect their valued assets
throughout the manufacturing process while increasing manufacturing productivity.
Through this "Value-Assured Fab" strategy, Asyst offers a broad range of
200mm and 300mm solutions that enable the safe transfer of wafers and information
between the process equipment and the fab line throughout the IC fabrication
process, preventing human, environmental, mechanical and chemical harm.
Encompassing robotics, portals, wafer and reticle carriers, connectivity
and interface products, and transport and loading products, Asyst's modular,
interoperable solutions allow chipmakers and original equipment manufacturers
(OEMs) to select and employ the value-assured, hands-off manufacturing
capabilities that best suit their needs.
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