Major Order Strengthens Asyst’s Leading Automation Market Position in China and Extends Asyst-Shinko’s 300mm AMHS Leadership into 200mm Marketplace

FREMONT, Calif., Jan. 7, 2003 — Asyst Technologies, Inc. (Nasdaq NM: ASYT) today announced that its majority-owned subsidiary and joint venture partner, Asyst-Shinko Inc. (ASI), has received a multi-million dollar order from China’s leading foundry, Semiconductor Manufacturing International (Shanghai) Corp. (SMIC) to install an Automated Materials Handling System (AMHS) at Fab 3, SMIC’s newest factory in Shanghai, China. The system is scheduled to begin installation in the spring of 2003.

SMIC believes it employs the most advanced 200mm automation solutions that help to improve time-to-market, cycle times, and cost for customers. SMIC chose the Asyst-Shinko AMHS solution because of its high performance and flexibility, the strong track record of Asyst-Shinko in some of the world’s most demanding factory environments, and SMIC’s successful history with the products and service from Asyst Technologies.
Already the leading provider of 300mm AMHS, having won six of the eleven 300mm AMHS installed to date, Asyst-Shinko has significantly expanded its 200mm capabilities to take advantage of the significant market opportunities in China. ASI also is able to leverage the strong China market position of its U.S. joint venture partner, Asyst Technologies. Asyst is the leading provider to China of standard mechanical interface (SMIF)-based isolation products for semiconductor-manufacturing automation, having won essentially all of this business to date from the five fabs that are operating or under construction by the region’s three current 200mm semiconductor-manufacturing customers. Asyst currently provides SMIF products, wafer sorters and Auto-ID lot tracking technology for all three of SMIC’s fabs.

About Asyst
Asyst Technologies, Inc. is a leading provider of integrated automation systems for the semiconductor manufacturing industry, which enable semiconductor manufacturers to increase their manufacturing productivity and protect their investment in silicon wafers during the manufacture of integrated circuits, or ICs. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst’s modular, interoperable solutions allow chipmakers and original equipment manufacturers, or OEMs, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst’s homepage is http://www.asyst.com

“Safe Harbor” Statement
Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to: the volatility of semiconductor industry cycles, failure to respond to rapid demand shifts, dependence on a few significant customers, the transition of the industry from 200mm wafers to 300mm wafers, risks associated with the acceptance of new products and product capabilities, competition in the semiconductor equipment industry, failure to efficiently integrate acquired companies, failure to retain employees, losses of market share, and other factors more fully detailed in the Company’s annual report on Form 10-K for the year ended March 31, 2002 and other reports filed with the Securities and Exchange Commission.

CONTACT:

Investor Contact
John Swenson
Asyst Technologies, Inc.
(510) 661-5000
(510) 661-5166 (fax)
jswenson@asyst.com >