FREMONT, Calif.-March 6, 2002 - Asyst Technologies, Inc. (Nasdaq: ASYT), a leading provider of integrated automation solutions that maximize semiconductor manufacturing productivity, today announced that Asyst's Plus" Portal XT integrated equipment front-end system has been selected by Thermo NORAN, a business unit of Thermo Electron Corporation (NYSE: TMO), for the MicronX" CXR 300mm metrology tool.

Chris Kauffold, Thermo NORAN's project manager for the tool, said, "We are driven to provide our customers with reliable, high-quality, high-performance materials analysis solutions. We selected the Plus Portal XT because we believe it will offer our customers a high-performance and highly reliable wafer handling solution while at the same time providing Thermo NORAN with manufacturing efficiencies such as shorter lead times and ease of integration."

The Plus Portal XT is a turnkey automated equipment front-end (AFE) system that incorporates a unique design approach and the latest in robotics and front-load technology to cost effectively deliver enhanced productivity, serviceability and ease-of-integration with original equipment manufacturer (OEM) semiconductor process, metrology and inspection tools. The Plus Portal XT system -- optimized for 300mm applications -- delivers an increase in throughput compared with its predecessor and unparalleled carrier interoperability. It utilizes a unique unibody frame, which simplifies manufacturing and integration with OEM equipment, as well as system service and maintenance.

This new AFE incorporates the IsoPort" 300mm load port, which includes a configurable front-opening unified pod (FOUP) latch-key mechanism, multiple info pad and mechanical pins, and multiple E-84 ports to provide the greatest level of interoperability available today.

The MicronX System CXR platform is a configurable, console-based, microbeam XRF (MXRF) film thickness and composition measuring tool. It combines the power, precision, and applications flexibility of Thermo NORAN's bench-top System XR platform with a vibration free, floor-standing design that can be docked to a complete range of SECS/GEM compatible automated sample handling options. CXR is a non-contact, non-destructive metrology tool ideally suited to the thin film measurement needs of the micro-electronics, semiconductor, telecommunications, and data storage industries.

About Thermo NORAN
Thermo NORAN manufactures precision analytical x-ray instrumentation for materials analysis in research, failure analysis, and quality control applications, providing elemental and compound information at microscopic and macroscopic levels with x-ray microanalysis (EDS/WDS/EBSD) and x-ray fluorescence (EDXRF) products. Thermo NORAN has provided analytical instrumentation for over 35 years, and is recognized for its premium quality products and service.

About Asyst
Asyst Technologies, Inc. is a leading provider of integrated automation systems for the semiconductor manufacturing industry, which enable semiconductor manufacturers to increase their manufacturing productivity and protect their investment in silicon wafers during the manufacture of integrated circuits, or ICs. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst’s modular, interoperable solutions allow chipmakers and original equipment manufacturers, or OEMs, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst’s homepage is http://www.asyst.com

“Safe Harbor” Statement under the Private Securities Litigation Reform Act of 1995
Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to: the volatility of semiconductor industry cycles, inability to manage cash flows, failure to respond to rapid demand shifts, dependence on a few significant customers, the transition of the industry from 200mm wafers to 300mm wafers, risks associated with the acceptance of new products and product capabilities, competition in the semiconductor equipment industry, failure to efficiently integrate acquired companies, failure to retain employees, and other factors more fully detailed in the company’s annual report on Form 10-K for the year ended March 31, 2002, and Form 10-Q for the period ended Sept. 30, 2002, filed with the Securities and Exchange Commission.

CONTACT:

Investor Contact
John Swenson
Asyst Technologies, Inc.
(510) 661-5000
(510) 661-5166 (fax)
jswenson@asyst.com