Second Major Chinese AMHS Project Affirms Asyst's Leading Automation Market Position in China and Continues Asyst-Shinko's Penetration into 200mm Marketplace

FREMONT, Calif., March 10, 2003 - Asyst Technologies, Inc. (Nasdaq NM: ASYT) today announced that its majority-owned subsidiary and joint venture partner, Asyst-Shinko Inc. (ASI), has substantially completed installation of a $10 million Automated Materials Handling System (AMHS) in a new 200mm fab in Shanghai, China. This is ASI's second 200mm fab project in China, following closely on the heels of the company's first win, announced in January of this year.

Already the leading provider of 300mm AMHS, having won 8 of the 14 300mm AMHS installed to date, Asyst-Shinko has significantly expanded its 200mm capabilities to take advantage of the significant market opportunities in China. ASI also is able to leverage the strong China market position of its U.S. joint venture partner, Asyst Technologies. Asyst is the leading provider to China of standard mechanical interface (SMIF)-based isolation products for semiconductor-manufacturing automation, having won essentially all of this business to date from the five fabs that are operating or under construction by the region's three current 200mm semiconductor-manufacturing customers.

About Asyst
Asyst Technologies, Inc. is a leading provider of integrated automation systems for the semiconductor manufacturing industry, which enable semiconductor manufacturers to increase their manufacturing productivity and protect their investment in silicon wafers during the manufacture of integrated circuits, or ICs. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst’s modular, interoperable solutions allow chipmakers and original equipment manufacturers, or OEMs, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst’s homepage is http://www.asyst.com

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Investor Contact
John Swenson
Asyst Technologies, Inc.
(510) 661-5000
(510) 661-5166 (fax)
jswenson@asyst.com