FREMONT, Calif.—May 27, 2003 —Asyst Technologies, Inc. (Nasdaq NM: ASYT) today introduced enhancements that enable its GW Associates GWconX300 software to solve the communications challenges associated with reporting equipment performance tracking event information. This represents a new market opportunity for Asyst, enabling the company to extend its market-leading position in OEM equipment connectivity software.

"Our focus in adding these enhancements to GWconX300 was to meet the needs of our OEM customers who are now beginning to receive requests for this capability from leading IC manufacturing companies,” said Paula LuPriore, vice president/general manager, Connectivity Solutions at Asyst. “As the market leader in providing equipment connectivity solutions we are committed to updating our products to ensure continued compliance with current, as well as new, SEMI standards.”

With the implementation of SEMI E116, chip manufacturers will have accurate equipment performance data by removing the variations usually seen from user input. This information when mapped to data from the Manufacturing Execution System (MES) will enable more precise calculations of SEMI E10 states as well as SEMI E79 metrics that then can be used to meet and improve Overall Equipment Effectiveness (OEE).

GWconX300 is software for implementing communications links on semiconductor wafer fabrication equipment, using the new Semiconductor Equipment and Materials International (SEMI) standard protocols required for all 300mm and advanced 200mm factoryautomation systems. It provides run-time software libraries designed for incorporation with the embedded control software of any type of 300mm equipment. GWconX300 also provides tools for rapid development and integration of connectivity software. Key features include automated handling of inter-compatibility between new SEMI standards; field-configurable adjustments that ensure compatibility of equipment with older legacy host computers; automatic process, syntax checks and replies to all messages mandated by the specified SEMI standard; and hooks for synchronization with the SEMI E84 standard, which ensures a smooth handshake between production equipment and the Automated Material Handling System (AMHS).

About Asyst:
Asyst Technologies, Inc. is a leading provider of integrated automation solutions that enable semiconductor manufacturers to increase manufacturing productivity and protect investments in silicon wafers during the manufacture of integrated circuits, or ICs. The company offers a broad range of 200mm and 300mm solutions that enable the safe transfer of wafers and information between process equipment and the fab line throughout the IC fabrication process, while reducing IC damage caused by human, environmental, mechanical and chemical factors. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst’s modular, interoperable solutions allow chipmakers and original equipment manufacturers, or OEMs, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst’s homepage is http://www.asyst.com

Safe Harbor Statement
This press release includes statements that are forward-looking, such as statements regarding future product development plans and anticipated product opportunities. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to, general economic conditions, semiconductor industry cycles, risks and uncertainties associated with the development of new technology and the acceptance of new products and product capabilities and other factors more fully detailed in the Companies’ most recent 10-K and 10-Q reports on file with the Securities and Exchange Commission.

CONTACT:

Investor Contact
John Swenson
Asyst Technologies, Inc.
(510) 661-5000
(510) 661-5166 (fax)
jswenson@asyst.com