"As we began the process of upgrading the Enviro platform, one of the key drivers was throughput, and the Spartan EFEM's wafer engine offered a very fast swap capability that was critical to maximizing process chamber utilization for the highest possible throughput," stated Wayne Anderson, CEO of ULVAC. "Our prior integration effort involving Asyst and the quality of its automation software make Asyst the logical choice to extend the Enviro to include Interface A compatibility."

Together with one of its integration service partners, PEER Group, Asyst was able to meet a very rapid timetable, delivering a fully integrated automation solution to ULVAC in just four weeks. Instrumental to the integration, the Peer Tool Orchestrator (PTO) allows end-users to achieve maximum benefit from Asyst's Spartan software and Interface A capabilities by pulling data from ConX300 and EIB to successfully and efficiently control the Enviro Optima and Spartan handler.

"This represents a significant milestone in our ongoing strategy to provide completely integrated automation solutions that benefit both OEMs and fabs," said Paula LuPiore, vice president and general manager, software, solutions and factory interface products, of Asyst. "Our hardware and software lead the industry from a technology and market perspective. Bringing them together, along with an expertise in implementation, offers the next level of capability. We have a lengthy and positive relationship with ULVAC and are extremely pleased to be able to bring this new capability to market in tandem with their new tool platform."

ULVAC had previously utilized Asyst's Plus PortalT XT with ConX300 with excellent results, both from the Asyst products as well as from the integration implemented by the PEER Group. Changing market demands, including the need for increased throughput and a smaller footprint, resulted in the move to Spartan. The Spartan EFEM with three ports met ULVAC's throughput requirements and the addition of EIB to the software package made the Enviro Optima Interface A compliant, a feature required by an increasing number of chipmakers.

The Spartan EFEM is an atmospheric equipment front-end solution that offers a simple, unified design that delivers higher throughput, higher cleanliness performance, optimized cleanroom space and lower cost of ownership (CoO). Asyst's ConX300 provides semiconductor equipment manufacturers integrated connectivity software solutions for 300mm fabs and 200mm fab upgrades. ConX300 supports all current SEMI 300mm connectivity standards for SECS/GEM, process management, carrier management, substrate tracking and control jobs. The company's Equipment Information Bridge (EIB) gives fabs, discrete process manufacturers, and software application developers unprecedented direct access to real-time data from manufacturing equipment. Asyst's EIB software is also fully Interface A (EDA) compliant, and Asyst's comprehensive involvement in current and new SEMI standards development ensures ongoing product compliance.

About Asyst

Asyst Technologies, Inc. is a leading provider of integrated automation solutions that enable semiconductor and flat panel display (FPD) manufacturers to increase their manufacturing productivity and protect their investment in materials during the manufacturing process. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst's modular, interoperable solutions allow chip and FPD manufacturers, as well as original equipment manufacturers, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst's homepage is http://www.asyst.com.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995

Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to, our ability to achieve expected customer benefits through our products, and other factors more fully detailed in the company's annual report on Form 10-K for the year ended March 31, 2005, and other reports filed with the Securities and Exchange Commission.

Asyst and Spartan are registered trademarks of Asyst Technologies, Inc.
ConX300, EIB and Plus Portal are trademarks of Asyst Technologies, Inc.