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300mm Wafer
Fab Applications
Productivity
and reliability of wafer logistics has become even more critical
in the highly automated world of 300mm manufacturing. In collaboration
with leading IC and equipment manufacturers, Asyst continues to develop
and deploy a comprehensive set of 300mm production-ready products,
designed to help global customers ease the transition to 300mm, minimize
the risks of setting up 300mm fabs, and quickly achieve profitability
goals.
Asyst's Fab Solutions provide customers with complete end-to-end
wafer management and delivery solutions. The combination of tracking
system, AMHS transport and storage, and wafer sorters helps fabs
ramp faster and achieve their productivity goals cost effectively.
Because these products work well with the automation systems Asyst
provides to major equipment manufacturers, integration is simplified,
and interoperability is greatly enhanced.
Maximum Productivity & Profitability
- Asyst's SMART-Traveler™ Auto
ID system is the semiconductor industry's preferred automated
carrier ID system. It provides a proven, flexible auto ID
capability that is SEMI E99 compliant, and it is integrated
with virtually all fab systems-including load ports, stockers,
and tracks. This assures the highest levels of wafer protection
and lot integrity throughout the fab.
- Asyst's next-generation Automated
Material Handling System (AMHS) meets the throughput and capacity
demands of high volume 300mmm manufacturing. It provides fabs
with the most comprehensive AMHS offering-one that gives customers
the benefits of Asyst's next-generation Continuous Flow Transport
(CFT), FasTrack™
System, and Asyst-Shinko's
best-of-breed hoist/car-based technology.
- Interacting with FOUPs and auto ID systems, Asyst's wafer
sorters assure maximum control throughout manufacturing
by reducing handling defects and improving yields.
- Asyst's Connectivity Software Solutions provides software products and
integration services to successfully meet the needs of 300mm
fabs. Equipment manufacturers are able to implement SEMI standard
compliant Connectivity Software Solutions using ConX300 and ConX300+,
leading edge products that address SEMI 300mm and object based
standards. Fab customers are able to take advantage of products
designed to simplify the task of providing for integration
of advanced manufacturing applications such as e-Diagnostics,
SPC, APC and Run to Run Control. All products are backed by
a technical staff experienced in deploying cost effective and
risk averse solutions.
Asyst Equipment Solutions enable manufacturers to quickly deliver
fully automated equipment that meet applicable standards and user
specifications cost effectively.
- IsoPort™, Asyst's
300mm load port, gives semiconductor tool equipment manufacturers
a highly configurable, automated wafer-handling solution that
easily integrates with their tools.
- Asyst's Plus™ Portal family is a modular,
high throughput, ultra clean, buffering platform designed to quickly
interface equipment manufacturer's equipment to Automated Material
Handling Systems (AMHS).
- The Axys™
Direct
robot conducts wafer swap operations faster and more reliably
than any robot available today.
- VersaPort™, a bridge
tool for 200mm to 300mm wafers, complies with the latest SEMI
and CE standards and industry guidelines, offering customers best
of class performance at the lowest cost of ownership.
Learn More About Specific Products
To learn more about how Asyst can optimize 300mm production, see
Fab Solutions, Equipment
Solutions or Connectivity Software Solutions. To learn more about specifc products, refer to:
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