Reticle Applications

		Products Overview

		Applications
		300mm Wafers
		200mm Wafers
		Fab Upgrades
		Reticles

		Fab Solutions

		Equipment Solutions

		Connectivity Software Solutions

Reticle Applications

Asyst's reticle handling and management products benefit fabs by improving the effectiveness of their reticle inventories. Asyst's reticle solutions also benefit mask shops that produce and ship reticles. With industry shifts to sub-0.25 micron linewidths and from 150mm to 200mm to 300mm wafer diameters, reticles have become increasingly more expensive to produce, and the impact of not having the right reticle at the right place and time has become significant. These trends have made isolation and automation strategies essential to alleviate contamination and ESD damage. As a result, Asyst's automated Narrow Reticle Indexer have become increasingly important to fab profitability.

As a platform for manipulating and protecting valuable reticles during production, the Asyst reticle handling product suite is in wide use by semiconductor device manufacturers, Photomask suppliers, and equipment manufacturers.

Maximum Productivity & Profitability

Asyst's Narrow Reticle Indexer protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools. Used in combination with SMIF-Pods™ and Asyst's SMIF-E™ inert gas purge system, a better than ISO Class 3 environment can be maintained, providing increased productivity and yields.
The SMART-Traveler™ System is the leading automated carrier ID system in use today. It provides everything needed to identify and manage reticle pods. The AdvanTag™ System, a fully automated data communications and ID system used in many 300mm fabs, tracks reticle pods.
SMIF-based reticle ports are available for most stepper and reticle manufacturing, from reticle inspection equipment suppliers, or directly from Asyst.

Learn More About Specific Products

To learn more about how Asyst can optimize reticle handling and management, see Equipment Solutions, Fab Solutions, and Connectivity Software Solutions. To learn more about specific products, refer to: