The core of Spartan EFEM lies at its central datum structure, in which all wafer handling components and movement are referenced. This single reference standard allows easy alignment and setup, and is scaleable for up to four loadport configurations. Fully compliant with SEMI standards, Spartan EFEM allows for a flexible range of applications, simplifying maintenance and cost of ownership.

Maximum Productivity & Profitability

• Features an optimized minienvironment for best-in-class cleanliness with better than ISO Class 1 performance.
• Dual, ultra-thin edge-grip wafer handling achieves fast swap time performance for the most demanding applications.
• Flexible, configurable design and advanced software support allow easy integration, serviceability and maintainability.

Spartan EFEM is smaller, lighter, less complex, more reliable, easier to integrate into 300mm automated fabs, and more energy efficient than any functionally equivalent system. With its industry-leading particle performance, combined with low cost-of-ownership driven by its high reliability, serviceability and maintainability, Spartan EFEM is what Asyst believes is the most powerful EFEM available on the market today.