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Plus™ Portal
XT
Asyst's Plus Portal XT is a complete automated equipment front-end (AFE) system for 300mm fab production and advanced 200mm factory automation systems. As part of Asyst's modular family, the Plus Portal incorporates a unique design approach and the latest robotics and front-load technology to deliver cost-effective, enhanced productivity and ease-of-integration with equipment manufacturer's semiconductor process, metrology and inspection tools.
"XT" is built around a unibody frame that has been designed for ease-of-service and manufacture, as well as high performance. It utilizes state-of-the-art, ultra-clean factory automation components for high reliability and easy integration and alignment.
Maximum Productivity & Profitability
- Flexible, unibody design reduces setup and integration time and allows easy service and maintenance.
- Optimized minienvironment for best-in-class cleanliness with better than ISO Class 2 performance.
- Compliant with applicable SEMI standards for faster integration with equipment manufacturer and end customer
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