Traditional “box-style” equipment front-end modules (EFEMs) are produced through the highly labor and time-intensive integration of multiple off-the-shelf components, including atmospheric wafer-handling robotics, loadports, wafer ID and tracking readers, minienvironments, and control software – to form a complex tool front-end. Inevitably, this results in frequent problems with interoperability, fault detection and handling, and supplier accountability.

Aware of these complexities and challenges, Asyst now offers equipment manufacturers and chipmakers truly next generation, high-performance atmospheric equipment front-end solutions with its Spartan™ EFEM . With its simple, unified design, Spartan EFEM delivers higher throughput, higher particle performance, optimized cleanroom space and lower cost of ownership (CoO).

Spartan EFEM advantages include:

• Simple design with proven technologies for higher throughput with improved reliability
• Better than ISO Class 1 particle performance
• Integrated design for easy setup and installation, speeding tool qualification
• Front mount access for fast and easy serviceability

Asyst also offers equipment manufacturers high-performance, reliable 200mm and 300mm front-end automation solutions with its Plus™ Portal XT. As a modular and ultra-clean buffering platform, Asyst's Plus Portal XT provides state-of-the-art factory automation to cost-effectively deliver enhanced productivity, serviceability and ease-of-integration.

Plus Portal XT advantages include:

• Flexible wafer handling system provides higher throughput with repeatable accuracy
• Unibody frame designed for ease-of-service and manufacture
• Compliant with all applicable SEMI standards

Learn More About Specific Products

• Spartan™ EFEM
• Plus™ Portal XT