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Interface
Solutions Asyst's
interface products leverage nearly two decades of proven performance
to offer customers world-class products for 300mm, 200mm, and 150mm
applications. These high-quality interface products offer world-class
performance:
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Reduced defect densities that exceed Class 1 performance
- Simple tool integration with standard ASCII/SECS communications
- SEMI and CE compliance
- Low cost of ownership
- Improved tool utilization from high reliability
- Interoperability excellence
Standard Mechanical Interface (SMIF)
The SMIF family of input/output (I/O)
devices is designed to protect products from contamination while
providing a standard mechanical interface to wafer fab production
tools. Used in combination with SMIF-Pods, multiple levels of
contamination control strategy can be accommodated.
Learn More About Specific Products
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