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Axys™
407 Atmospheric Robot
Based on field experience and customer input, the Axys™ 407 combines
proven reliability and performance with a completely new frame concept
to produce a robot that outperforms others in reproducibility, reliability,
stiffness, and throughput. In fact, the Axys™ 407 modular robot meets
or exceeds all expectations for wafer handling and reliability.
It's advanced arm design provides superior planarity, reproducibility,
and reliability using an integrated laser wafer mapper, heavy duty
cross roller bearings, single piece cast aluminum arms and stainless
steel band drive.
Its base is designed with fewer parts to improve reliability.
- There are no belts or pulleys, and its backbone frame design
provides increased stiffness and flexible mounting.
- Brushless DC motors eliminate brush wear and assure higher MTBF.
- The integrated 486 based controller reduces space required for
integration and creates faster, smoother robot performance.
Maximum Productivity & Profitability
- Easily replaces other robots.
- Handles up to 300mm wafers.
- Direct-coupled drive system with brushless motors provides better
repeatability and throughput.
- Low particle generation contributes to higher yields.
- Class 1 compatible.
- Modular construction for ease-of-maintenance.
- SEMI S2-93A compatible and CE/S2-93A compliant.
- LST Linear Shuttle Track option for wafer transfer applications
ensures maintenance free, highly reliable, smooth motion at all
speeds of travel.
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