Based on the reliable Axys™ 407 robot platform, Axys Direct's dual end-effectors conduct wafer exchanges faster and more reliably than any robot available today. Direct drive motors on all motion axes deliver the highest levels of speed and repeatability.

Used with Asyst's EG-300 Edge-Grip Prealigner , Axys Direct's active edge-grip end-effectors minimize wafer stress with closed loop force-feedback, reduce backside wafer contact by decreasing scratches and reducing particles, and ensure proper wafer gripping with break-the-beam wafer sensing.

• Dual end-effectors and fast wafer exchanges for higher throughput.
  
  
• Direct drive on all motion axes eliminates belts and bands, reducing known failure modes.
  
  
• Fewer moving parts and less than 130 parts total maximize reliability and serviceability.
  
  
• 2 and 3 I/O support without the need for a linear track.
  
  
• Advanced path planning, teaching, and diagnostics capability.