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Model 5X Prealigner
This reliable wafer prealigner finds the exact center of the wafer
and the precise orientation of its notch or flat. Using high-speed
circuitry and a fast charge couple device (CCD) sensor, it provides
extremely low cycle fume. Model 5X is the drop-in replacement for
Asyst's Model 5, with the same command set, physical dimensions,
and accuracy. The Model 5X is manually selectable to accommodate
200mm or 300mm wafer sizes.
Maximum Productivity & Profitability
- Flexible design enables the Model 5X to be
set up to work with any wafer shuffle system, and a simple serial
port command system lets any kind of host computer easily communicate
with the prealigner.
- High accuracy, unbeatable reliability meets
customer quality demands; and since the prealigner has no X, Y,
or Z motion, moving parts are kept to a minimum, with less chance
for failure.
- Compact, the Model 5X is fully self-contained;
there is no external control box to mount; just plug in a serial
cable, 24 volts, and vacuum.
- Unique, one-step method rotates the wafer a
single time, then positions the notch at the desired orientation
so the robot can then pick up the wafer at its exact center.
- Fastest cycle time in the industry saves time
and money.
- Smart software includes a robust command set
that uses the same easy-to-use format as other Asyst products;
commands cover every feature while providing for often-used composite
functions and single operations.
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