|
|
|
Robotics
Asyst's robotics family consists of atmospheric robots, harsh (wet)
environment robots and prealigners - all enabling fast wafer exchange
and transfer. They deliver unsurpassed wafer handling yields and reliability,
handling up to 300mm wafers.
- Asyst's robots offer the superior combination of motion accuracy,
speed, mechanical reliability, and superior repeatability-all
with low cost of ownership.
- Asyst's Model 5X Prealigner offers
high precision and high throughput modes for software selectable
wafer sizes from 150mm to 300mm.
- Asyst's EG-300
Edge-Grip Prealigner
offers high-speed, high-accuracy alignment while simultaneously
eliminating backside contact for 300mm wafers. An optional buffering
stage enables significantly improved throughput for systems
using a single-blade wafer transfer robot.
Learn More About Specific Products
|
|
