|
|
|
SMIF-Indexer™(INX)
SMIF-INX products are designed to supply wafer indexing for fixed
Z-axis wafer handlers, or cassette positioning to a fixed plan for
Z-axis wafer handlers. With an installed base of over 10,000 units,
the Asyst SMIF-INX has proven its versatility, functionality, and
reliability. Contamination control benefits of the SMIF system are
well documented and document how the latest generation INX 2200 EP
provides a substantial increase in die yield for fabs. Indexers meet
SEMI E15 and E19 specifications and are CE certified.
Maximum Productivity & Profitability
- The internal PTFE-ULPA filtration system maintains a better
than ISO Class 3 environment.
- SMIF-INX mounts directly into the process tool
- DC Servo control with position feedback provides high-speed
wafer indexing with minimal impact on tool cycle time ensuring
positioning accuracy of ±0.005 inches (0.127mm).
- Patented laser-based sensing system provides precision wafer
and slot location, wafer position mapping, cross-slotted wafer
detection and sensing of protruding wafers and automatic reseating.
- Quick disconnect assembly offers easy maintenance.
|
|
