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SMIF-VersaPort
Manual Open Cassette Adapter (MOCA)
Asyst's VersaPort MOCA adapter provides a solution for 200mm non-SMIF,
open-cassette fabs. It easily attaches to the SMIF-VersaPort
2200, retaining all of its functionality and features.
- Wafer mapping/cross-slotted sensing
- Wafer protrusion sensing and re-seating
- Excessive wafer protrusion sensing
- Ergonomic tilt
- Configurability with complete software and hardware compatibility
and only one integration for both SMIF and open cassette.
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