The AdvanTag system radio frequency ID is a fully automated data communications and identification system that enables the instant identification of Front-Opening-Unified-Pods (FOUPs), lots, pods, boxes, reticles, and probe cards. The system uses a maintenance-free MicroTag ™ that permanently attaches to the fab asset and travels with it- between tools, in the Automated Material Handling System ( AMHS ), and in storage.

Maximum Productivity & Profitability

• Wireless radio frequency communications between the MicroTag and the AdvanTag antenna allows reading and writing of data in almost any application; line of site is not required.
  
  
• AdvanTag utilizes a miniature MicroTag, which attaches to assets providing permanent maintenance free storage of 136 bytes of data such as lot ID, wafer ID, reticle ID, carrier history, and next process step.
  
  
• MicroTag can be read and written at tool load ports (SMIF and open cassette), in the AMHS, in WIP racks, in tool buffers, anywhere positive identification of lots and fab assets is required.

Proof Point

Asyst's RFID systems have been used for more than 10 years and are installed in more than 30 fabs.

AdvanTag™ Reader

The AdvanTag reader and antenna are compact components that read and write microtags using very low power 134khz Radio Frequency transmissions. It can read MicroTags up to a distance of 12 inches and communicates to a host via ASCII or SECS message sets.