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Automated Material Handling Systems (AMHS)

Fab Upgrades
Through its joint venture with the AMHS division of Shinko Electric Co., Ltd., now Asyst-Shinko, Asyst is positioned as the leading provider of 300mm AMHS. In addition, the company's innovative FasTrack™ Continuous Flow Transport (CFT) provides unprecedented cycle time and throughput advantages in many applications, as well as the opportunity to create hybrid transport and tool loading solutions using Asyst-Shinko products and FasTrack.

Asyst's FasTrack System provides fully integrated materials transport and tool loading with the capacity and speed required to support high-volume 300mm fab production. FasTrack enables 3-5 times faster delivery in high-throughput applications. FOUPs can be stored close to the load port, supporting a 35-second transfer from storage to load port. In addition, FasTrack's micro-stocking and buffering technology does not consume valuable real estate in the fab.

Asyst-Shinko is the world's leading supplier of 300mm AMHS, having won more than half of the current worldwide installations, including the two largest installations to date--the first production 300mm fab for a large US-based chip manufacturer and the first production 300mm fab for TSMC. Asyst-Shinko's 300mm installed base includes more than 21.8 kilometers of track, 970 various transport vehicles, and nearly 200 stockers.

The Asyst-Shinko joint venture, completed in the fall of 2002, enables Asyst to provide the industry with the most comprehensive AMHS offering-one that gives customers the benefits of Asyst's next-generation CFT-based FasTrack System and the complementary best-of-breed hoist/car-based technology from Asyst-Shinko.

Maximum Productivity & Profitability

  • Seamless interbay and intrabay transport reduces cycle time and eliminates AMHS bottlenecks

  • Zero footprint buffering saves floor space and increases overall equipment effectiveness (OEE)

  • Reliability meets or exceeds all ITRS roadmap requirements.

  • Compliant with SEMI standards for safety and interoperability.

  • Low ceiling profile and loading supports 200mm to 300mm facility upgrades.

  • FasTrack delivers the highest throughput with the lowest delivery variability.

Learn More About Specific Products



"As TSMC increases its 300mm production, automated material handling and tool loading are becoming critical for fab productivity. This joint venture between Asyst, a long-term TSMC supplier of automation solutions, and Shinko, a proven provider of AMHS systems, is of potential great benefit to TSMC's 300mm manufacturing."

--Dr. Morris Chang, chairman and CEO of TSMC

"Asyst is extremely well positioned for the future opportunity in semiconductor manufacturing automation. We have the strongest market position in our core technologies of tool front-end automation, as well as exciting new opportunities in automated material handling, both with our own technology and with unique industry partnerships such as Asyst-Shinko."

-Steve Schwartz

   


Copyright © 2005 Asyst Technologies, Inc.  All rights reserved.