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Wafer Sorters

SPARTAN

Traditional “box-style” sorter designs rely on the labor and cost-intensive process of integrating multiple off-the-shelf components such as loadports, atmospheric robots, minienvironments and control software to create a highly complex wafer sorting machine. Inevitably, this leads to lower reliability, higher cost of ownership and sub-optimal performance.

Aware of these complexities and challenges, Asyst now offers chipmakers truly next generation, high-performance wafer handling with its Spartan™ Sorter. With its simple, unified design, Spartan Sorter delivers higher levels of cleanliness, enhanced wafer safety and lower cost of ownership (CoO).

Spartan Sorter advantages include:

  • Simple design with proven technologies for greater productivity with improved reliability
  • Integrated design enables quick start-ups for fast time-to-production
  • Fast swap times with efficient transfer and alignment
  • Better than ISO Class 1 performance

Asyst also offers chipmakers high-performance, reliable 200mm and 300mm wafer management with its Substrate Management System™(SMS). Reducing handling-induced defects and improving yields, the SMS has proven track records and is in wide use today by device manufacturers.

SMS advantages include:

  • Randomization or wafer-to-slot position tracking
  • Automated tracking of splits, merges, send-a-heads
  • Wafer-level verification of material integrity (OCR, T7, BCR)

Learn More About Specific Products




"In our discussions with customers, it became clear to us that 300mm fabs would require a new generation of sorter technology, not only to deal with the larger wafer size, but to provide higher levels of cleanliness, enhanced wafer safety, and lower cost of ownership.  Spartan Sorter is the result of this next generation thinking." 

-- Wayne Nobles, VP/GM Automation Sytems Division

   


Copyright © 2005 Asyst Technologies, Inc.  All rights reserved.