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Wafer Sorters
Traditional “box-style” sorter designs rely on the labor and cost-intensive
process of integrating multiple off-the-shelf components such as loadports,
atmospheric robots, minienvironments and control software to create a highly
complex wafer sorting machine. Inevitably, this leads to lower reliability,
higher cost of ownership and sub-optimal performance.
Aware of these complexities and challenges, Asyst now offers chipmakers truly
next generation, high-performance wafer handling with its Spartan™
Sorter. With its simple, unified design, Spartan Sorter delivers higher levels
of cleanliness, enhanced wafer safety and lower cost of ownership (CoO).
Spartan Sorter advantages include:
- Simple design with proven technologies for greater productivity with improved
reliability
- Integrated design enables quick start-ups for fast time-to-production
- Fast swap times with efficient transfer and alignment
- Better than ISO Class 1 performance
Asyst also offers chipmakers high-performance, reliable 200mm
and 300mm wafer management with its Substrate
Management System™(SMS). Reducing handling-induced defects and improving
yields, the SMS has proven track records and is in wide use today by device
manufacturers.
SMS advantages include:
- Randomization or wafer-to-slot position tracking
- Automated tracking of splits, merges, send-a-heads
- Wafer-level verification of material integrity (OCR, T7, BCR)
Learn More About Specific Products
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